Patentable/Patents/US-9618466
US-9618466

Use of specific resistivity measurement for indirect determination of the purity of silanes and germanes and a corresponding process

PublishedApril 11, 2017
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Technical Abstract

The invention relates to a method for indirectly determining the purity of silanes and germanes using a device for measuring specific resistance. The invention further relates to a system for industrially producing and/or filling containers with silanes or germanes, including a quality control in which a device is used for measuring specific resistance.

Patent Claims

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Classification Codes (CPC)

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G01N
Patent Metadata

Filing Date

December 28, 2010

Publication Date

April 11, 2017

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Cite as: Patentable. “Use of specific resistivity measurement for indirect determination of the purity of silanes and germanes and a corresponding process” (US-9618466). https://patentable.app/patents/US-9618466

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